Details

The Zeta-20 Optical Microscope is a fully integrated microscope based system that provides 3D imaging and metrology capability in a small, robust and cost effective package. Based on proprietary technology, the Zeta-20 images and analyses the surface features on samples of all smooth to rough, low reflectivity to high reflectivity, transparent to opaque.

Model and Make

Zeta 20 3D Optical Profiler, ZETA Instruments.

Specifications

  • 5x, 20x,100x standard objective magnifications are available.
  • ZDot innovative 3D imaging is standard in optical profilers. The ZDot technology with unique transmissive and dark field illumination schemes as well as a variety of objectives allows the tool to handle the most ‘difficult’ of surfaces.
  • ZIC enhanced differentials interference contrast imaging is great for nano- meter level surface Roughness.
  • ZSI shearing interferometer provides Angstrom level vertical resolution.
  • ZX5 vertical scanning interferometry is ideal for measuring nanometer heights to over large field of view
  • ZFT reflectometry based thin film thickness measurement option.